The upper part of the trolley adopts a non-contact (maglev) design, and the lower part adopts a friction rod to cooperate with the vacuum ferro for stable transmission.
Shorten the trolley spacing and increase the utilization efficiency of target coating.
The substrate can be fully coated and has the advantages of low PARTICLE process.
It can cooperate with the auto-handing pick-and-place film and CIM plant planning.
The operating platform is established to facilitate equipment maintenance.
Customized coating effective area and specification structure to meet industrial process requirements.
Process and industry:
Metal sputter process / reactive sputter process / oxide sputter process
BSITO / solar cell / touch sensor / TFT / Optical / active and passive component / Chip EMI and other industries.
