Roll-To-Roll sputter system
- The plasma cleaning process is combined.
- The design of the isolation sub-chamber can be planned to meet the coexistence of multiple sputter processes in one machine architecture.
- Customized design to meet process requirements.
- Hanging type loading and unloading mechanism and CIM planning function included.
- Chamber door can be full open and easy to maintenance.
- Customized deposition effective area and process.