Horizontal In Line sputter system
- The plasma cleaning process is combined .
- The trolley transfer by the vacuum ferro for stable transmission.
- Shorten the trolley spacing and increase the utilization efficiency of target coating.
- The substrate can be fully coated and has the advantages of dual side process.
- It can cooperate with the auto-handing pick-and-place film and CIM plant planning.
- The operating platform is established to facilitate equipment maintenance.
- Customized coating effective area and specification structure to meet industrial process requirements.