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繁中
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Company Profile
About
Management team
Business philosophy
Equipment advantages
History
News & Events
Product Information
Vacuum system
Vacuum evaporation system
Vacuum sputter system
Cluster optical evaporation system
Plasma clean system
ADL deposition system
Factory Affairs System and Engineering
Factory System and Engineering
Customer Service
Repair and maintenance
Consumables for sale
Equipment upgrade
Fu Cheng Optoelectronic
About FU CHENG OPTOELECTRONIC
Business item
Sales service network
Maintenance training base
Contact us
Company Profile
About
Management team
Business philosophy
Equipment advantages
History
News & Events
Product Information
Vacuum system
Vacuum evaporation system
Vacuum sputter system
Cluster optical evaporation system
Plasma clean system
ADL deposition system
Factory Affairs System and Engineering
Factory System and Engineering
Customer Service
Repair and maintenance
Consumables for sale
Equipment upgrade
Fu Cheng Optoelectronic
About FU CHENG OPTOELECTRONIC
Business item
Sales service network
Maintenance training base
Contact us
Company Profile
About
Management team
Business philosophy
Equipment advantages
History
News & Events
Product Information
Vacuum system
Vacuum evaporation system
Vacuum sputter system
Cluster optical evaporation system
Plasma clean system
ADL deposition system
Factory Affairs System and Engineering
Factory System and Engineering
Customer Service
Repair and maintenance
Consumables for sale
Equipment upgrade
Fu Cheng Optoelectronic
About FU CHENG OPTOELECTRONIC
Business item
Sales service network
Maintenance training base
Contact us
Company Profile
About
Management team
Business philosophy
Equipment advantages
History
News & Events
Product Information
Vacuum system
Vacuum evaporation system
Vacuum sputter system
Cluster optical evaporation system
Plasma clean system
ADL deposition system
Factory Affairs System and Engineering
Factory System and Engineering
Customer Service
Repair and maintenance
Consumables for sale
Equipment upgrade
Fu Cheng Optoelectronic
About FU CHENG OPTOELECTRONIC
Business item
Sales service network
Maintenance training base
Contact us
Contact
Plasma Clean System
Category :
Plasma clean system
,
Vacuum system
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Plasma ion source evaporation system
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Vacuum Sputter System of Load-Lock Type
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Feature of product:
It has the characteristics of high efficiency, high quality and low operating cost.
Using radio frequency (RF) power supply, it is easy to control and easy to operate.
It has an automatic pressure control system (APC system) to accurately control the process pressure.
It can have multiple plasma sources (ICP/RIE/PE) at the same time.
Process and industry:
LED/semiconductor/industry/passive components/optical components.
Surface cleaning/Removal of residual photoresist (DESCUM)/Film removal/Wire/(Die) Bonding pretreatment.
Product Gallery:
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Related:
Vacuum Sputter System of Load-Lock Type
Inter Back sputter system
In Line sputter system. ( Tile 7 degrees).
Laser (laser) optical evaporation system
