Vacuum Sputter System of Load-Lock Type
- Category : Vacuum sputter system, Vacuum system
- Feature of product:
- The plasma cleaning process is combined.
- Plan to vertical or horizontal type for multi-carrier loading function.
- Customized design to meet process requirements.
- Auto loading and unloading and CIM planning function included.
- Equipment easy to maintenance.
- Customized deposition effective area of carrier .
- Process and industry:
- Metal sputter process / reactive sputter process / oxide sputter process.
- Optical / active and passive component / hand phone / Chip EMI and other industries.
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