Optical Cluster Evaporation System


  • Semiconductor optical evaporation process with EFEM system.
  • Dual E-Beam with IAD source, high deposition rate and high throughput.
  • Auto filler of Ta3O5 source included.
  • SECS and CIM function included.
  • Easy to maintenance.
  • Customized design to meet process requirements.
  • Oxide evaporation process.
  • Semiconductor optical / band pass filter / AR layer of cover glass / color coating and other industries.