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Vacuum system
Vacuum evaporation system
Vacuum sputter system
Cluster optical evaporation system
Plasma clean system
ADL deposition system
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Fu Cheng Optoelectronic
About FU CHENG OPTOELECTRONIC
Business item
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Company Profile
About
Management team
Business philosophy
Equipment advantages
History
News & Events
Product Information
Vacuum system
Vacuum evaporation system
Vacuum sputter system
Cluster optical evaporation system
Plasma clean system
ADL deposition system
Factory Affairs System and Engineering
Factory System and Engineering
Customer Service
Repair and maintenance
Consumables for sale
Equipment upgrade
Fu Cheng Optoelectronic
About FU CHENG OPTOELECTRONIC
Business item
Sales service network
Maintenance training base
Contact us
Company Profile
About
Management team
Business philosophy
Equipment advantages
History
News & Events
Product Information
Vacuum system
Vacuum evaporation system
Vacuum sputter system
Cluster optical evaporation system
Plasma clean system
ADL deposition system
Factory Affairs System and Engineering
Factory System and Engineering
Customer Service
Repair and maintenance
Consumables for sale
Equipment upgrade
Fu Cheng Optoelectronic
About FU CHENG OPTOELECTRONIC
Business item
Sales service network
Maintenance training base
Contact us
Company Profile
About
Management team
Business philosophy
Equipment advantages
History
News & Events
Product Information
Vacuum system
Vacuum evaporation system
Vacuum sputter system
Cluster optical evaporation system
Plasma clean system
ADL deposition system
Factory Affairs System and Engineering
Factory System and Engineering
Customer Service
Repair and maintenance
Consumables for sale
Equipment upgrade
Fu Cheng Optoelectronic
About FU CHENG OPTOELECTRONIC
Business item
Sales service network
Maintenance training base
Contact us
Contact
Optical Cluster Sputter System
Category :
Cluster optical evaporation system
,
Vacuum system
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Feature of product:
Semiconductor optical process with EFEM system.
META process design of metal coating + ICP oxidation/nitridation improves, high deposition rate and high throughput.
SECS and CIM function included.
Easy to maintenance.
Customized design to meet process requirements.
Process and industry:
Metal sputter process / oxide sputter process / Meta sputter process.
Semiconductor optical / band pass filter / color coating and other industries.
Product Gallery:
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Related:
In Line sputter system. ( Tile 7 degrees).
Batch sputter system
Plasma Clean System
Laser (laser) optical evaporation system
