Optical Cluster Sputter System

  • Semiconductor optical process with EFEM system.
  • META process design of metal coating + ICP oxidation/nitridation improves, high deposition rate and high throughput.
  • SECS and CIM function included.
  • Easy to maintenance.
  • Customized design to meet process requirements.
  • Metal sputter process / oxide sputter process / Meta sputter process.
  • Semiconductor optical / band pass filter / color coating and other industries.