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Company Profile
About
Management team
Business philosophy
Equipment advantages
History
News & Events
Product Information
Vacuum system
Vacuum evaporation system
Vacuum sputter system
Cluster optical evaporation system
Plasma clean system
ADL deposition system
Factory Affairs System and Engineering
Factory System and Engineering
Customer Service
Repair and maintenance
Consumables for sale
Equipment upgrade
Fu Cheng Optoelectronic
About FU CHENG OPTOELECTRONIC
Business item
Sales service network
Maintenance training base
Contact us
Company Profile
About
Management team
Business philosophy
Equipment advantages
History
News & Events
Product Information
Vacuum system
Vacuum evaporation system
Vacuum sputter system
Cluster optical evaporation system
Plasma clean system
ADL deposition system
Factory Affairs System and Engineering
Factory System and Engineering
Customer Service
Repair and maintenance
Consumables for sale
Equipment upgrade
Fu Cheng Optoelectronic
About FU CHENG OPTOELECTRONIC
Business item
Sales service network
Maintenance training base
Contact us
Company Profile
About
Management team
Business philosophy
Equipment advantages
History
News & Events
Product Information
Vacuum system
Vacuum evaporation system
Vacuum sputter system
Cluster optical evaporation system
Plasma clean system
ADL deposition system
Factory Affairs System and Engineering
Factory System and Engineering
Customer Service
Repair and maintenance
Consumables for sale
Equipment upgrade
Fu Cheng Optoelectronic
About FU CHENG OPTOELECTRONIC
Business item
Sales service network
Maintenance training base
Contact us
Contact
Optical Cluster Evaporation System
Optical Cluster Evaporation System
Category :
Cluster optical evaporation system
,
Vacuum system
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Optical Cluster Sputter System
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Feature of product:
Semiconductor optical evaporation process with EFEM system.
Dual E-Beam with IAD source, high deposition rate and high throughput.
Auto filler of Ta3O5 source included.
SECS and CIM function included.
Easy to maintenance.
Customized design to meet process requirements.
Process and industry:
Oxide evaporation process.
Semiconductor optical / band pass filter / AR layer of cover glass / color coating and other industries.
Product Gallery:
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Related:
ALD (atomic layer) system
Plasma ion source evaporation system
Inter Back sputter system
Electron beam + thermal evaporation system
