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Roll-To-Roll sputter system

  • Feature of product:
  • The plasma cleaning process is combined.
  • The design of the isolation sub-chamber can be planned to meet the coexistence of multiple sputter processes in one machine architecture.
  • Customized design to meet process requirements.
  • Hanging type loading and unloading mechanism and CIM planning function included.
  • Chamber door can be full open and easy to maintenance.
  • Customized deposition effective area and process.
  • Process and industry:
  • Metal sputter process / reactive sputter process / oxide sputter process.
  • PET Optical / active and passive component / touch sensor / Cu layer and other industries.
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