ALD cassette batch type mass production type was successfully developed

The batch production type ALD-PE model was successfully developed. The deposition rate of the 6inch wafer cassette type multi-chip is about 1.32Å/cycle, which is close to 1.6Å/cycle, and the unevenness of the long film has reached 3%~5% Inside, it meets the industry’s mass production specifications, and the process meets the goal: water and oxygen protection layer & large curved Lens AR Layer.