ALD cassette batch type mass production type was successfully developed

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The batch production type ALD-PE model was successfully developed. The deposition rate of the 6inch wafer cassette type multi-chip is about 1.32Å/cycle, which is close to 1.6Å/cycle, and the unevenness…

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Introduced mass production continuous equipment for ultra-thin glass coating corresponding to low resistance/high resistance

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The BSITO process equipment for the thin panel is fully mass-produced, and the thickness of the thin plywood can correspond to 0.2mm (0.1 paste 0.1), and a single mass production…

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